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APPLICATION
Barrier metal
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Capacitor high-k
Metal gate high-k
DPT ULTO
Gap fill SiO2
Gate SiO2/SiN
Capacitor electrode
Barrier metal
Interconnection metal
Contact metal
DPT Hard mask SiON
DPT Hard mask ACL
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TBTDETa
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RuEtCp2
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CpTa
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TBTEMTa
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TiCl4
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TDMAT
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