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APPLICATION
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Capacitor high-k
Metal gate high-k
DPT ULTO
Gap fill SiO2
Gate SiO2/SiN
Capacitor electrode
Barrier metal
Interconnection metal
Contact metal
DPT Hard mask SiON
DPT Hard mask ACL
ELEMENTRY
Al
Hf
Ru
Ti
C
Mo
Si
V
Co
Ni
Sn
W
Ge
Pt
Ta
Zn
Zr
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TMA
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TBTDETa
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CpHf
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TEMAHf
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CpZr
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TEMAZr
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Hf(OtBu)4
1
Metal gate high-k
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