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Elementry
Ti
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APPLICATIONS
Capacitor high-k
Metal gate high-k
DPT ULTO
Gap fill SiO2
Gate SiO2/SiN
Capacitor electrode
Barrier metal
Interconnection metal
Contact metal
DPT Hard mask SiON
DPT Hard mask ACL
ELEMENTRY
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Ti
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Mo
Si
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Co
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Pt
Ta
Zn
Zr
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Cp*Ti(OMe)3
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TiCl4
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TDMAT
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