Elementry | iCHEMS

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Applicaitons

Applicaitons

Elementary

Elementary

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Elementry

Capacitor high-k

Metal gate high-k

Capacitor electrode

Interconnection metal

DPT Hard mask SiON

DPT Hard mask ACL

Al

TMA

DMEAA

MPA

DMAH

C

1-hexene

Co

CCTBA

CpCo(CO)2

Hf

TEMAHf

Hf(OtBu)4

CpHf

Ni

NiEtCp2

Ru

MPA

TBTEMTa

RuEtCp2

Si

3TMS

4TMS

BTBAS

TDMAS

HCDS

BDEAS

SiCl4

DIPAS

Ta

MPA

CpTa

TBTEMTa

TBTDETa

Ti

Cp*Ti(OMe)3

TiCl4

TDMAT

W

TBDMW

Zr

CpZr

TEMAZr

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