ALL PRODUCTS | Precursors 2/3

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Applicaitons

Applicaitons

Elementary

Elementary

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Capacitor high-k

Metal gate high-k

Capacitor electrode

Interconnection metal

DPT Hard mask SiON

DPT Hard mask ACL

RuEtCp2
TDMAT
TiCl4
BTBAS
TDMAS
HCDS
BDEAS
SiCl4
DIPAS
TBTDETa
Hf(OtBu)4
Cp*Ti(OMe)3

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